| Attribute | Respective Value |
| Maximum measuring range XYl | 250x100mm |
| Stage | Motorized, programmable 150 mm x 75 mm Z axis adjustment with push button controls. |
| Measuring Unit | Rigid, cast aluminum base and nickel plated workable, 4 Kg load capacity |
| Worktable | Hardcoat Anodized with fixture holes, removable stage glass, 25 kg payload |
| Optics | Telecentric, dual optical magnification with 4x high magnification lens |
| Illumination | Substage profile light |
| | Co-axial square on surface light |
| | Programmable 8 sector oblique Ring light |
| | 8 sector/ 8 ring SmartRing light LED™ (White) |
| Software | Zone 3 |
| | Snap – X Measure |
| XY Accuracy | 7.0+L/50 µm |