| Attribute | Respective Value |
| XYZ Travel | 300x300x200 mm |
| XYZ Scale Resolution | 0.1µm, including dual Y-axis scale |
| Stage drive system | DC Servo with 4-axis control (X, Y, Z and Zoom) with multifunction handheld controller |
| Worktable | Hardcoat Anodized with fixture holes, removable stage glass, 30 kg payload |
| Optics | - AccuCentric® auto-compensating zoom,
- Motorized: 1.0x lens, 2.0x lens attachment
- 1.0x adaptor tube
|
| Illumination | Substage LED profile (green) |
| | LED Co-axial surface (white) |
| | SmartRing light LED™ (White) |
| Software | Zone 3 |
| | Measure mind |
| | Measure X |
| XY Accuracy | 1.5+5L/1000 µm |
| Z Accuracy | 2.5+5L/1000 µm |