| Attribute | Respective Value |
| XYZ travel | 300x300x250mm |
| XYZ Scale Resolution | 0.1µm, with dual z axis scales standard |
| Drive System | DC Servo with 4-axis control (X, Y, Z and Zoom) with multifunction handheld controller |
| Worktable | Hardcoat Anodized with fixture holes, removable stage glass, 30 kg payload |
| Optics | AccuCentric® auto-compensating with up to 25 calibrated position |
| Illumination | LED numerical aperture matching substage |
| | LED Co-axial |
| | TTL surface |
| | 8 sector/ 8 ring SmartRing light LED™ (White) |
| Software | Zone 3 |
| | Measure mind |
| | Measure X |
| XY Accuracy | 1.8+5L/1000 µm |
| Z Accuracy | 3.4+5L/1000 µm |