Key Features
- 2D detail visibility of up to 150 nm with new water-cooled 190 kV transmission tube
- Temperature stability with granite-based manipulation
- Innovative and intuitive Geminy graphical user interface with touchscreen operation for quick inspection
- Application flexibility using trajectories such as helical CT scan, horizontal field-of-view extension, virtual rotation axis, and standard Quick/Quality Scan
- Precise metrology MPESD = 3,9 µm + L/75, measured as a deviation of sphere distance referring to VDI 2630-1.3
- ‘HeliExtend’ (helical CT scan and reconstruction method)
System Capabilities
The FF20 CT is a compact, high-resolution computed tomography system, perfectly suited for inspection of your small items such as
- Semiconductor packaging
- Probes of new materials (e.g. metal, plastics, CFRP)
- Microsystems, MEMS, MOEMS
- Medical devices like e.g. cannulas
The 190 kV transmission X-ray tube is newly developed and achieves a detail visibility in radioscopy of up to 150 nm. Electronic components like SMD
Application Images
Electronics
Technical Data
| Attribute | Respective Value |
| Sample Diameter | 280 [mm] (11.02″) |
| Sample Height | 700 [mm] (27.6″) |
| Maximum Sample Weight | 17 [kg] |
| System Dimension | 2380 x 945 x 2180 [mm] |
| X-ray Tube | Y.FXT 190.61 transmission tube |
| CT Modes | QuickScan ®, QualityScan, Cone-beam CT, Helical CT, virtual rotation axis, FoV extensions, Volume Crop |
| Manipulation | Granite-based, active air damping, 6 axes, wide FDD range |